Plasma Sensors - Plasma Probe Diagnostics, Langmuir Probe, Plasma Density

PLASMA SENSORS is a group of highly skilled professionals in the field of plasma physics, plasma probe diagnostics and scientific instrumentation design.

We build Plasma Probe Diagnostic Instruments and design custom Plasma Sources for industrial and academic R&D.

Our principal product Multifunction Plasma Probe Analyzer (MFPA) is used in research centres worldwide and considered the most advanced plasma probe instrument on the market. It produces results that are unparalleled in accuracy.

The MFPA is built as a reconfigurable device capable for plasma probe diagnostics in steady and fast time-varying plasmas.

Our Plasma Probes design minimizes EEDF distortion through efficient RF signal rejection and wide band noise suppression.

Standard plasma probe for EEDF measurements has built-in filter with RF rejection in the range between 2 and 200 MHz.

Spatial measurements of the plasma can be done automatically with our Plasma Probe Linear Drive.

Controller software provides seamless interface for synchronization with the plasma probe measurement routines.

Plasma Probe Linear Drive travel length and the connection flange can be customized.

Our custom ferromagnetic enhanced ICP sources, FMICP comprise unique combination of compactness, high power transfer efficiency and negligible DC bias and RF plasma potential.

This source reliably operates over wide range of gas pressure (1 mTorr - 10 Torr) and RF power (15 W - 500 W).

FMICP is complemented with a high efficiency RF generator with auto-matching and display of the plasma power absorption.

Significance of Accurate EEDF Measurements

In most gas discharge plasmas the EEDF is not Maxwellian, and the assumption of Maxwellian EEDF leads to significant errors in calculations of the plasma parameters and rates of plasma-chemical processes inferred from the classical Langmuir probe diagnostics. Read more...

Comparison with Existing Systems

Most of published EEDF data obtained in laboratory experiments and commercial reactors lack information about the bulk of low energy electrons and high energy tail. Read more...