PLASMA SENSORS is a group of highly skilled professionals in the field of plasma physics,
probe diagnostics and scientific instrumentation design.
We build Probe Diagnostic Instruments and design custom Plasma Sources for industrial and academic R&D.
design minimizes EEDF distortion through efficient RF signal rejection and
wide band noise suppression.
Standard probe for EEDF measurements has built-in filter with RF rejection in the range between 2 and 200 MHz.
Spatial measurements of the plasma can be done automatically with
Probe Linear Drive.
Controller software provides seamless interface for synchronization with the probe measurement routines.
The Linear Drive travel length and the connection flange can be customized.
custom ferromagnetic enhanced ICP sources, FMICP
comprise unique combination of compactness, high power transfer efficiency and negligible DC bias and RF plasma potential.
This source reliably operates over wide range of gas pressure (1 mTorr - 10 Torr) and RF power
(15 W - 500 W).
FMICP is complemented with a high efficiency RF generator with auto-matching and
display of the plasma power absorption.
In most gas discharge plasmas the EEDF is not Maxwellian, and the assumption of Maxwellian EEDF leads to
significant errors in calculations of the plasma parameters and rates of plasma-chemical processes inferred from
the classical Langmuir probe diagnostics.
Most of published EEDF data obtained in laboratory experiments and commercial reactors lack information about the bulk of low energy electrons and high energy tail.
PLASMA SENSORS | 14 Gibbs Street, Suite 1 | Brookline, MA 02446 | firstname.lastname@example.org | 718.929.1825 | 617.584.4923